SEMICONDUCTOR MEMS CLEANING EQUIPMENT

Chemical Supply Unit

Chemical Supply Unit

Available for a wide range of total systems, from large to small type are available for chemical supply to meet your needs

Chemical Supply Unit Photo

Capable of feeding chemicals from the central unit to the unit with manufacturing equipment by request signals from the manufacturing equipment.
Available for monitoring of all chemical supply units by the main control box.

Features

Central Unit with Large Capacity Capacity for chemicals from 100 L to 400 L
Unit with Equipment Capacity for Chemicals from 18 L to 100 L
Closely Monitoring for Units Capable of monitoring all units by the main control box and monitoring of each room and each floor by sub-monitor
Support for Branch Feeding Capable of feeding through branch passages to multiple units from the valve box