TH (Cassette)
TH (Cassette)
Batch-type equipment that can be optimally customized with our experiences and results in a wide range of fields
From manual to fully automatic, we can manufacture equipment to suit your applications. This supports a wide range of workpiece sizes with high quality and realizes a stable temperature control and highly accurate concentration control. This also supports a wide range of chemicals such as acids, alkalis, and organic solvents. This suits various drying methods such as spin drying, IPA vapor drying, and Marangoni drying.
Features
High Process Performance | Simple processing structure and optimized circulation nozzles to ensure uniform circulation |
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High Throughput | Available for a control system capable of controlling the conveyance between tanks to minimize the distance and the time |
Improved Maintainability | Parts laid out for easy maintenance |
Equipment Design | It can be designed for process optimization based on a wealth of experimental data |
Extensive Results | Available to offer the best equipment customized to meet your needs based on our results in a wide range of fields, including semiconductors and MEMS |
Supported processes
RCA Cleaning / Nitride Film Removal / Oxide Film Removal / Polymer Removal / Resist Stripping / Silicon Etching / Sacrificial Layer Etching / Metal Etching / Developing