Spin Coater
Spin Coater
Multi-functional spin coater that supports various wafer sizes by changing setups
Stable spin drive offers reduction in uneven coatings, resulting in a high uniformity.
Features
| Compatible with Various Chemicals | Available for proposal of equipment configuration that meets the properties of the required chemicals |
|---|---|
| Stable Feeding of chemicals | Uniform feeding with thorough control of the volume of chemicals |
Supported processes
Resist Coating