KJ (Cassette-less)
KJ (Cassette-less)
Batch-type cleaning equipment with an advantage in stable cleaning due to cassette-less operation
Cassette-less batch-type equipment that is constantly evolving based on many years of experience. This offers world-class precision and toughness contributing to manufacturing of advanced devices.
Features
| High Throughput | Prevention of throughput reduction due to rate-controlled conveyance, ensured by making tanks selectable for wafer transfer for more efficient transfer of wafers between tanks |
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| Outstanding Process Performance | Stable performance ensured by thorough analysis of factors related to process performance such as temperature, concentration, and flow rate |
| Smaller Footprint | Space saving by adopting single-sided access and independent lifter conveyance machines to each treatment tank |
Supported processes
RCA Cleaning / Nitride Film Removal / Oxide Film Removal / Polymer Removal / Resist Stripping