SEMICONDUCTOR MEMS CLEANING EQUIPMENT

CLO

Cup Type Single Wafer Lift-Off Equipment

Single wafer lift-off processor with stability and stripping power

Photo

Despite of being a single-wafer type, completely dipping wafers in chemicals ensures the liquid temperature stability, ultrasonic attachability, and ultrasonic efficiency that could not be achieved with conventional single-wafer systems, thereby greatly improving the lift-off efficiency.

Features

Special Shape of Chamber Swelling and spinning allowed by the cup shape
Precision Finish Cleaning Damage-less and precision finishing allowed by flash spray
Prevention of Reattachment Centrifugal force-based liquid removal system is adopted

Supported processes

Lift-Off / Resist Stripping / Polymer Removal / Particle Removal

このWebサイトはサービス向上、広告、宣伝及び営業等の目的からCookieを使用しています。
同意すると閲覧履歴とお客様より提供いただいた情報を紐付けて分析に利用する場合があります。

×